Capture probability of assembly defects in 14 nm half-pitch line/space DSA patterns

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Authors
Pathangi Sriraman, Hari; Chan, BT; Van Look, Lieve; Vandenbroeck, Nadia; Van Den Heuvel, Dieter; Cross, Andrew; Hong, Sung Eun; Nafus, Kathleen; D'Urzo, Lucia; Gronheid, Roel
Conference
41st International Conference on Micro- and Nanofabrication - MNE
Title
Capture probability of assembly defects in 14 nm half-pitch line/space DSA patterns
Publication type
Meeting abstract
Embargo date
9999-12-31
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