Publication:

Capture probability of assembly defects in 14 nm half-pitch line/space DSA patterns

Date

2015

Meeting abstract

Simple item page Full metadata Statistics

Files

33039.pdf 216.01 KB

Author(s)

Pathangi Sriraman, Hari

;

;

Van Look, Lieve

;

Vandenbroeck, Nadia

;

Van Den Heuvel, Dieter

;

;

;

Nafus, Kathleen

;

;

Statistics

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Acq. date: 2026-08-05