Publication:

Capture probability of assembly defects in 14 nm half-pitch line/space DSA patterns

Date

2015

Meeting abstract

Simple item page Full metadata Statistics

Files

33039.pdf 216.01 KB

Author(s)

Pathangi Sriraman, Hari

;

;

Van Look, Lieve

;

Vandenbroeck, Nadia

;

Van Den Heuvel, Dieter

;

;

;

Nafus, Kathleen

;

;

Statistics

2021 since deposited on 2021-10-22

Acq. date: 2026-01-26