Publication:

Capture probability of assembly defects in 14 nm half-pitch line/space DSA patterns

Date

2015
Meeting abstract
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dc.contributor.authorPathangi Sriraman, Hari
dc.contributor.authorChan, BT
dc.contributor.authorVan Look, Lieve
dc.contributor.authorVandenbroeck, Nadia
dc.contributor.authorVan Den Heuvel, Dieter
dc.contributor.authorCross, Andrew
dc.contributor.authorHong, Sung Eun
dc.contributor.authorNafus, Kathleen
dc.contributor.authorD'Urzo, Lucia
dc.contributor.authorGronheid, Roel
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorVan Look, Lieve
dc.contributor.imecauthorVandenbroeck, Nadia
dc.contributor.imecauthorVan Den Heuvel, Dieter
dc.contributor.imecauthorCross, Andrew
dc.contributor.imecauthorNafus, Kathleen
dc.contributor.imecauthorD'Urzo, Lucia
dc.contributor.imecauthorGronheid, Roel
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.date.accessioned2021-10-22T21:42:56Z
dc.date.available2021-10-22T21:42:56Z
dc.date.embargo9999-12-31
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25742
dc.source.beginpageWed-A6-c1
dc.source.conference41st International Conference on Micro- and Nanofabrication - MNE
dc.source.conferencedate21/09/2015
dc.source.conferencelocationDen Haag The Netherlands
dc.title

Capture probability of assembly defects in 14 nm half-pitch line/space DSA patterns

dc.typeMeeting abstract
dspace.entity.typePublication
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