Browsing by author "Merkulov, Alexandre"

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Cesium/xenon dual beam sputtering in a Cameca instrument

Pureti, Rathaiah; Douhard, Bastien; Delmotte, Joris; Merkulov, Alexandre; Vandervorst, Wilfried (2014)
Characterization of arsenic PIII Implants in FinFETs by LEXES, SIMS and STEM-EDX

Meura, Kim-Anh Bui-Thi; Torregrosa, Frank; Robbes, Anne-Sophie; Choi, Seoyoun; Merkulov, Alexandre; Moret, Mona; Duchaine, Julian; Horiguchi, Naoto; Li, Letian; Mitterbauer, Christoph (2014)