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Cesium/xenon dual beam sputtering in a Cameca instrument
Publication:
Cesium/xenon dual beam sputtering in a Cameca instrument
Date
2014
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pureti, Rathaiah
;
Douhard, Bastien
;
Delmotte, Joris
;
Merkulov, Alexandre
;
Vandervorst, Wilfried
Journal
Surface and Interface Analysis
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1937
since deposited on 2021-10-22
Acq. date: 2025-10-27
Citations
Metrics
Views
1937
since deposited on 2021-10-22
Acq. date: 2025-10-27
Citations