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Publication:

Cesium/xenon dual beam sputtering in a Cameca instrument

Date

2014

Journal article

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Author(s)

Pureti, Rathaiah

;

Douhard, Bastien

;

Delmotte, Joris

;

Merkulov, Alexandre

;

Vandervorst, Wilfried

Journal

Surface and Interface Analysis

Statistics

1942 since deposited on 2021-10-22

Acq. date: 2026-07-28