Cesium/xenon dual beam sputtering in a Cameca instrument

Metadata

Show full item record

Authors

Pureti, Rathaiah; Douhard, Bastien; Delmotte, Joris; Merkulov, Alexandre; Vandervorst, Wilfried

ISSN

0142-2421

Issue

S1

Journal

Surface and Interface Analysis

Volume

46

Title

Cesium/xenon dual beam sputtering in a Cameca instrument

Publication type

Journal article

Collections

Articles