Publication:

Cesium/xenon dual beam sputtering in a Cameca instrument

Date

2014
Journal article
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dc.contributor.authorPureti, Rathaiah
dc.contributor.authorDouhard, Bastien
dc.contributor.authorDelmotte, Joris
dc.contributor.authorMerkulov, Alexandre
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-22T04:51:59Z
dc.date.available2021-10-22T04:51:59Z
dc.date.issued2014
dc.identifier.issn0142-2421
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24401
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/sia.5658/abstract
dc.source.beginpage25
dc.source.endpage30
dc.source.issueS1
dc.source.journalSurface and Interface Analysis
dc.source.volume46
dc.title

Cesium/xenon dual beam sputtering in a Cameca instrument

dc.typeJournal article
dspace.entity.typePublication
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