Browsing by author "Shimoaoki, Takeshi"

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Manufacturability improvements in EUV resist processing towards NXE:3300 processing

Kuwahara, Yuhei; Matsunaga, Koichi; Shimoaoki, Takeshi; Kawakami, Shinichiro; Nafus, Kathleen; Foubert, Philippe; Goethals, Mieke; Shimura, Satoru (2014)
Track processing optimizations for different EUV resist platforms: preparing for a 3300 baseline process

Foubert, Philippe; Matsunaga, Koichi; Shite, Hideo; Shimoaoki, Takeshi; Nafus, Kathleen; Goethals, Mieke; Van Den Heuvel, Dieter; Hermans, Jan; Hendrickx, Eric; Kosugi, Hitoshi (2013)