Manufacturability improvements in EUV resist processing towards NXE:3300 processing

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Authors
Kuwahara, Yuhei; Matsunaga, Koichi; Shimoaoki, Takeshi; Kawakami, Shinichiro; Nafus, Kathleen; Foubert, Philippe; Goethals, Mieke; Shimura, Satoru
Conference
Advances in Patterning Materials and Processes XXXI
Title
Manufacturability improvements in EUV resist processing towards NXE:3300 processing
Publication type
Proceedings paper
Embargo date
9999-12-31
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