Publication:

Manufacturability improvements in EUV resist processing towards NXE:3300 processing

Date

2014
Proceedings Paper
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Author(s)

Kuwahara, Yuhei
;
Matsunaga, Koichi
;
Shimoaoki, Takeshi
;
Kawakami, Shinichiro
;
Nafus, Kathleen  
;
Foubert, Philippe  
;
Goethals, Mieke
;
Shimura, Satoru

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