Publication:

Manufacturability improvements in EUV resist processing towards NXE:3300 processing

Date

2014

Proceedings Paper

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Files

27758.pdf 690.94 KB

Author(s)

Kuwahara, Yuhei

;

Matsunaga, Koichi

;

Shimoaoki, Takeshi

;

Kawakami, Shinichiro

;

Nafus, Kathleen

;

Foubert, Philippe

;

Goethals, Mieke

;

Shimura, Satoru

Metrics

1980 since deposited on 2021-10-22

Acq. date: 2026-01-07