Browsing by author "Knoops, An"

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Wafer level characterization of the sacrificial HDP oxide lateral etching by anhydrous vapor HF with ethanol vapor for SiGe MEMS structures

Cui, Hushan; Van Hoof, Rita; Severi, Simone; Witvrouw, Ann; Knoops, An; Delande, Tinne; Pancken, Joris; Claes, Martine (2010)
Wafer level characterization of the sacrificial HDP oxide lateral etching by anhydrous vapor HF with ethanol vapor for SiGe MEMS structures

Cui, Hushan; Van Hoof, Rita; Severi, Simone; Witvrouw, Ann; Knoops, An; Delande, Tinne; Pancken, Joris; Claes, Martine (2010)