Authors

Cui, Hushan; Van Hoof, Rita; Severi, Simone; Witvrouw, Ann; Knoops, An; Delande, Tinne; Pancken, Joris; Claes, Martine

Conference

218th ECS Meeting Symposium J3: Microfabricated and Nanofabricated Systems for MEMS/NEMS 9

Title

Wafer level characterization of the sacrificial HDP oxide lateral etching by anhydrous vapor HF with ethanol vapor for SiGe MEMS structures

Publication type

Meeting abstract

Embargo date

9999-12-31