Browsing by author "Leusink, Gert"
Now showing items 1-3 of 3
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Rethinking surface reactions in nanoscale dry processes toward atomic precision and beyond: a physics and chemistry perspective
Ishikawa, Kenji; Ishijima, Tatsuo; Shirafuji, Tatsuru; Armini, Silvia; Despiau-Pujo, Emilie; Gottscho, Richard A; Leusink, Gert; Marchack, Nathan; Murayama, Takahide; Oehrlein, Gottlieb S.; Park, Sangwuk; Hayashi, Hisataka; Kinoshita, Keizo (2019) -
Ruthenium recess for buried power rail integration
Gupta, Anshul; Grzeskowiak, Jodi; Jourdan, Nicolas; Yu, Kai-Hung; Joy, Nicolas; Kundu, Shreya; Teugels, Lieve; Boemmels, Juergen; Adelmann, Christoph; Heylen, Nancy; Jamieson, Geraldine; Smith, Jeffrey; Raley, Angelique; deVilliers, Anton; Biesemans, Serge; Wilson, Chris; Leusink, Gert; Tokei, Zsolt (2019) -
Ultralow resistive wrap around contact to scaled FinFET devices by using ALD-Ti contact metal
Chew, Soon Aik; Yu, Hao; Schaekers, Marc; Demuynck, Steven; Mannaert, Geert; Kunnen, Eddy; Rosseel, Erik; Hikavyy, Andriy; Dangol, Anish; De Meyer, Kristin; Mocuta, Dan; Horiguchi, Naoto; Leusink, Gert; Wajda, Cory; Hakamata, T; Hasegawa, T; Tapily, K; Clark, R (2017)