Browsing by author "Li, M.-F."
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Practical solutions to enhance EWF tunability of Ni FUSI gate electrode on HfO2
Wang, X.P.; Yang, J.J.; Chen, J.D.; Xie, R.L.; Li, M.-F.; Zhu, C.X.; Yu, HongYu; Du, A.Y.; Lim, P.C.; Lim, Andy; Mi, Y.Y.; Lai, Doreen M.Y.; Loh, W.Y.; Biesemans, Serge; Lo, G.Q.; Kwong, D.-L. (2007) -
Understanding and prediction of EWF modulation induced by various dopants in the gate stack for a gate-first integration scheme
Wang, Xin Peng; Yu, HongYu; Yeo, Y.-C.; Li, M.-F.; Chang, Shou-Zen; Cho, Hag-Ju; Kubicek, Stefan; Wouters, Dirk; Groeseneken, Guido; Biesemans, Serge (2008)