Practical solutions to enhance EWF tunability of Ni FUSI gate electrode on HfO2

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Authors
Wang, X.P.; Yang, J.J.; Chen, J.D.; Xie, R.L.; Li, M.-F.; Zhu, C.X.; Yu, HongYu; Du, A.Y.; Lim, P.C.; Lim, Andy; Mi, Y.Y.; Lai, Doreen M.Y.; Loh, W.Y.; Biesemans, Serge; Lo, G.Q.; Kwong, D.-L.
Conference
International Conference on Solid State Devices and Materials - SSDM
Title
Practical solutions to enhance EWF tunability of Ni FUSI gate electrode on HfO2
Publication type
Proceedings paper
Embargo date
9999-12-31
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