Publication:

Practical solutions to enhance EWF tunability of Ni FUSI gate electrode on HfO2

Date

2007

Proceedings Paper

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Files

14176.pdf 317.62 KB

Author(s)

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Lai, Doreen M.Y.

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Biesemans, Serge

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Statistics

1937 since deposited on 2021-10-16

Acq. date: 2026-04-26