Browsing by author "Van den berg, J."
Now showing items 1-3 of 3
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Characterisation of high-k containing nanolayers by reference-free X-ray fluorescence analysis with synchrotron radiation
Kolbe, M.; Beckhoff, B.; Krumrey, M.; Reading, M.; Van den berg, J.; Conard, Thierry; De Gendt, Stefan (2009) -
High resolution medium energy ion scattering analysis for the quantitative depth profiling of ultra thin high-k Hf based films
Van den berg, J.; Reading, M.A.; Armour, D.G.; Bailey, P.; Noakes, T.; Conard, Thierry; De Gendt, Stefan (2009) -
Physical characterization of the metal/high-k layer interaction upon annealing
Conard, Thierry; Franquet, Alexis; Vandervorst, Wilfried; Reading, M.; Van den berg, J.; Van Elshocht, Sven; Schram, Tom; Adelmann, Christoph; De Gendt, Stefan (2008)