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High resolution medium energy ion scattering analysis for the quantitative depth profiling of ultra thin high-k Hf based films
Publication:
High resolution medium energy ion scattering analysis for the quantitative depth profiling of ultra thin high-k Hf based films
Date
2009
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Van den berg, J.
;
Reading, M.A.
;
Armour, D.G.
;
Bailey, P.
;
Noakes, T.
;
Conard, Thierry
;
De Gendt, Stefan
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Abstract
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1885
since deposited on 2021-10-18
Acq. date: 2025-10-26
Citations
Metrics
Views
1885
since deposited on 2021-10-18
Acq. date: 2025-10-26
Citations