Publication:
High resolution medium energy ion scattering analysis for the quantitative depth profiling of ultra thin high-k Hf based films
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1887 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-10
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Metrics
Views
1887 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-10
Citations