Publication:
High resolution medium energy ion scattering analysis for the quantitative depth profiling of ultra thin high-k Hf based films
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1891 since deposited on 2021-10-18
3last month
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Acq. date: 2026-03-17
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Statistics
Views
1891 since deposited on 2021-10-18
3last month
1last week
Acq. date: 2026-03-17
Citations