Publication:
High resolution medium energy ion scattering analysis for the quantitative depth profiling of ultra thin high-k Hf based films
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1888 since deposited on 2021-10-18
1last month
Acq. date: 2026-02-24
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Statistics
Views
1888 since deposited on 2021-10-18
1last month
Acq. date: 2026-02-24
Citations