Publication:

High resolution medium energy ion scattering analysis for the quantitative depth profiling of ultra thin high-k Hf based films

Date

Loading...
Thumbnail Image

Abstract

Description

Metrics

Views

1885 since deposited on 2021-10-18
Acq. date: 2025-10-26

Citations

Metrics

Views

1885 since deposited on 2021-10-18
Acq. date: 2025-10-26

Citations