Authors

Kolbe, M.; Beckhoff, B.; Krumrey, M.; Reading, M.; Van den berg, J.; Conard, Thierry; De Gendt, Stefan

Conference

Analytical Techniques for Semiconductor Materials and Process Characterization 6 - ALTECH

Title

Characterisation of high-k containing nanolayers by reference-free X-ray fluorescence analysis with synchrotron radiation

Publication type

Proceedings paper

Embargo date

9999-12-31