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Characterisation of high-k containing nanolayers by reference-free X-ray fluorescence analysis with synchrotron radiation
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Characterisation of high-k containing nanolayers by reference-free X-ray fluorescence analysis with synchrotron radiation
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Date
2009
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kolbe, M.
;
Beckhoff, B.
;
Krumrey, M.
;
Reading, M.
;
Van den berg, J.
;
Conard, Thierry
;
De Gendt, Stefan
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1886
since deposited on 2021-10-17
Acq. date: 2025-12-10
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Metrics
Views
1886
since deposited on 2021-10-17
Acq. date: 2025-12-10
Citations