Browsing by author "Metzger, T.H."

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Study of the effect of dielectric porosity on the stress in advanced Cu/low-k interconnects using x-ray diffraction

Wilson, Chris; Zhao, Chao; Zhao, Larry; Metzger, T.H.; Tokei, Zsolt; Croes, Kristof; Pantouvaki, Marianna; Beyer, Gerald; Horsfall, A.B.; O Neill, A.G. (2009)
Synchrotron measurement of the effect of line-width scaling on stress in advanced Cu/Low-k interconnects

Wilson, Chris; Croes, Kristof; Zhao, Chao; Metzger, T.H.; Zhao, Larry; Beyer, Gerald; Horsfall, A.B.; O'Neill, A.G.; Tokei, Zsolt (2009)