Publication:
Synchrotron measurement of the effect of line-width scaling on stress in advanced Cu/Low-k interconnects
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1945 since deposited on 2021-10-18
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Acq. date: 2026-02-25
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Statistics
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1945 since deposited on 2021-10-18
1last month
1last week
Acq. date: 2026-02-25
Citations