Authors

Wilson, Chris; Croes, Kristof; Zhao, Chao; Metzger, T.H.; Zhao, Larry; Beyer, Gerald; Horsfall, A.B.; O'Neill, A.G.; Tokei, Zsolt

ISSN

0021-8979

Issue

5

Journal

Journal of Applied Physics

Volume

106

Title

Synchrotron measurement of the effect of line-width scaling on stress in advanced Cu/Low-k interconnects

Publication type

Journal article