Publication:
Synchrotron measurement of the effect of line-width scaling on stress in advanced Cu/Low-k interconnects
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1946 since deposited on 2021-10-18
2last month
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Acq. date: 2026-03-17
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Statistics
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1946 since deposited on 2021-10-18
2last month
1last week
Acq. date: 2026-03-17
Citations