Browsing by author "Vasil'eva, A.N."

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1-D model of OSG low-k films modification by EUV/VUV emission

Rakhimova, T.V.; Rakhimov, A.T.; Mankelevich, Y.A.; Lopaev, D.V.; Ziryanov, S.M.; Kovalev, A.S.; Vasil'eva, A.N.; Proshina, O.V.; Braginsky, O.V.; Kurchikov, K.; Baklanov, Mikhaïl (2013)
Low-k films modification under EUV and VUV radiation

Rakhimova, T.; Rakhimov, A.; Mankelevich, Y.A.; Lopaev, D.V.; Kovalev, A.S.; Vasil'eva, A.N.; Zyryanov, S.M.; Kurchikov, K.; Proshina, O.; Voloshin, D.G.; Novikova, N.N.; Krishtab, Mikhail; Baklanov, Mikhaïl (2014)