Low-k films modification under EUV and VUV radiation

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Authors

Rakhimova, T.; Rakhimov, A.; Mankelevich, Y.A.; Lopaev, D.V.; Kovalev, A.S.; Vasil'eva, A.N.; Zyryanov, S.M.; Kurchikov, K.; Proshina, O.; Voloshin, D.G.; Novikova, N.N.; Krishtab, Mikhail; Baklanov, Mikhaïl

ISSN

0022-3727

Issue

2

Journal

Journal of Physics D: Applied Physics

Volume

47

Title

Low-k films modification under EUV and VUV radiation

Publication type

Journal article

Embargo date

9999-12-31

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