1-D model of  OSG low-k films modification by EUV/VUV emission

Rakhimova, T.V.; Rakhimov, A.T.; Mankelevich, Y.A.; Lopaev, D.V.; Ziryanov, S.M.; Kovalev, A.S.; Vasil'eva, A.N.; Proshina, O.V.; Braginsky, O.V.; Kurchikov, K.; Baklanov, Mikhaïl

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1-D model of OSG low-k films modification by EUV/VUV emission

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2013

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1-D model of OSG low-k films modification by EUV/VUV emission

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