Browsing by author "Neira, Imanol"
Now showing items 1-3 of 3
-
Assessment of resist outgassing related EUV optics contamination for CAR and non-CAR material chemistries
Pollentier, Ivan; Neira, Imanol; Gronheid, Roel (2011) -
Correlation of EUV optics contamination and the photoresist chemistry
Pollentier, Ivan; Neira, Imanol; Goethals, Mieke; Gronheid, Roel (2010) -
Unraveling the effect of resist composition on EUV optics contamination
Pollentier, Ivan; Neira, Imanol; Goethals, Mieke; Gronheid, Roel; Tarutani, S.; Tamaoki, H.; Takahashi, T.; Tsubaki, H. (2011)