Correlation of EUV optics contamination and the photoresist chemistry

Thumbnail
View/open
Metadata
Show full item record
Authors
Pollentier, Ivan; Neira, Imanol; Goethals, Mieke; Gronheid, Roel
Conference
International Symposium on Extreme Ultraviolet Lithography
Title
Correlation of EUV optics contamination and the photoresist chemistry
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections