Browsing by author "Morschbacher, Marcio"

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Strain relaxation of SiGe/Si by He implantation: controlling dislocation sources at He precipitates

Huging, Norbert; Luysberg, Martina; Urban, Knut; Buca, Dan; Hollander, Bernd; Mantl, Siegfried; Morschbacher, Marcio; Fichtner, Paulo; Loo, Roger; Caymax, Matty (2005)
Strain relaxation of SiGe/Si heterostructures by helium ionimplantation and subsequent annealing : Helium precipitates acting as dislocation sources

Hueging, Norbert; Luysberg, Martina; Urban, Knut; Buca, Dan; Hollaender, Bernd; Mantl, Siegfried; Morschbacher, Marcio; Fichtner, Paulo; Loo, Roger; Caymax, Matty (2005)