Strain relaxation of SiGe/Si heterostructures by helium ionimplantation and subsequent annealing : Helium precipitates acting as dislocation sources

Publication:

2005

Proceedings Paper

Author(s)

Hueging, Norbert

;

Luysberg, Martina

;

Urban, Knut

;

Buca, Dan

;

Hollaender, Bernd

;

Mantl, Siegfried

;

Morschbacher, Marcio

;

Fichtner, Paulo

;

;

1893 since deposited on 2021-10-16

Acq. date: 2026-09-14