Browsing by author "Caputa, C."
Now showing items 1-3 of 3
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Enhanced oxidation of TiAIN barriers integrated in three dimensional ferroelectric capacitor structures
Lisoni, Judit; Johnson, Jo; Goux, Ludovic; Paraschiv, Vasile; Maes, David; Vander Meeren, Hans; Willegems, Myriam; Haspeslagh, Luc; Wouters, Dirk; Caputa, C.; Zambrano, R.; Turquat, Ch.; Muller, Ch. (2007-01) -
Ferroelectric properties and reliability of sidewall SBT in integrated 3D FeCAPs
Goux, Ludovic; Menou, N.; Lisoni, Judit; Schwitters, M.; Paraschiv, Vasile; Maes, David; Zhen, X.; Kaczer, Ben; Haspeslagh, Luc; Wouters, Dirk; Muller, C.; Caputa, C.; Zambrano, R. (2004) -
MOCVD-SBT thin films for advanced FeRAM: deposition and film formation processes
Wouters, Dirk; Everaert, Jean-Luc; Schwitters, Michael; Johnson, Jo; Vander Meeren, Hans; Monchoix, H.; Mitaut, C.; Van Autryve, L.; Caputa, C.; Zambrano, R. (2003)