Browsing by author "Hopstaken, M."

Now showing items 1-2 of 2

N-2 as carrier gas: an alternative to H-2 for enhanced epitaxy of Si, SiGe and SiGe:C

Meunier-Beillard, Philippe; Caymax, Matty; Van Nieuwenhuysen, Kris; Doumen, Geert; Brijs, Bert; Hopstaken, M.; Geenen, Luc; Vandervorst, Wilfried (2004)
N2 as carrier gas: an alternative to H2 for enhanced epitaxy of Si, SiGe and SiGe:C

Meunier-Beillard, Philippe; Caymax, Matty; Van Nieuwenhuysen, Kris; Doumen, Geert; Brijs, Bert; Hopstaken, M.; Geenen, Luc; Vandervorst, Wilfried (2003)