Publication:
N2 as carrier gas: an alternative to H2 for enhanced epitaxy of Si, SiGe and SiGe:C
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2317 since deposited on 2021-10-15
7last month
2last week
Acq. date: 2026-01-07
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Metrics
Views
2317 since deposited on 2021-10-15
7last month
2last week
Acq. date: 2026-01-07
Citations