N2 as carrier gas: an alternative to H2 for enhanced epitaxy of Si, SiGe and SiGe:C

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Authors
Meunier-Beillard, Philippe; Caymax, Matty; Van Nieuwenhuysen, Kris; Doumen, Geert; Brijs, Bert; Hopstaken, M.; Geenen, Luc; Vandervorst, Wilfried
Conference
Abstracts Book ISTDM - 1st International SiGe Technology and Device Meeting
Title
N2 as carrier gas: an alternative to H2 for enhanced epitaxy of Si, SiGe and SiGe:C
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Meeting abstract
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