Publication:

N2 as carrier gas: an alternative to H2 for enhanced epitaxy of Si, SiGe and SiGe:C

Date

2003
Meeting abstract
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Author(s)

Meunier-Beillard, Philippe
;
Caymax, Matty  
;
Van Nieuwenhuysen, Kris
;
Doumen, Geert  
;
Brijs, Bert
;
Hopstaken, M.
;
Geenen, Luc
;
Vandervorst, Wilfried  

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Abstract

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2304 since deposited on 2021-10-15
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