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N2 as carrier gas: an alternative to H2 for enhanced epitaxy of Si, SiGe and SiGe:C
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2316 since deposited on 2021-10-15
6last month
Acq. date: 2026-01-05
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Metrics
Views
2316 since deposited on 2021-10-15
6last month
Acq. date: 2026-01-05
Citations