Publication:
N2 as carrier gas: an alternative to H2 for enhanced epitaxy of Si, SiGe and SiGe:C
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2329 since deposited on 2021-10-15
5last month
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Acq. date: 2026-03-17
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Statistics
Views
2329 since deposited on 2021-10-15
5last month
2last week
Acq. date: 2026-03-17
Citations