Browsing by author "Lokasani, Ragava"
Now showing items 1-7 of 7
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Assessment of challenges in EUV resist outgassing and contamination characterization
Pollentier, Ivan; Lokasani, Ragava; Gronheid, Roel (2012) -
EUV outgassing and contamination in multilayer material schemes
Pollentier, Ivan; Truffert, Vincent; Lokasani, Ragava; Gronheid, Roel (2011) -
Imec update on resist outgassing qualification
Pollentier, Ivan; Lokasani, Ragava; Gronheid, Roel (2012) -
Outgassing studies on EUV underlayers containing PAGs
Guerrero, Douglas; Ouattara, Tantiboro; Pollentier, Ivan; Lokasani, Ragava (2011) -
Progress in understanding EUV resist related outgassing and contamination
Pollentier, Ivan; Lokasani, Ragava; Gronheid, Roel (2012) -
Relationship between resist outgassing and witness sample contamination in NXE outgas qualification using electrons and EUV
Pollentier, Ivan; Lokasani, Ragava; Gronheid, Roel; Hill, S.; Tarrio, C.; Lucatorto, T. (2013) -
Update on resist outgassing qualification towards NXE3100
Pollentier, Ivan; Lokasani, Ragava; Gronheid, Roel (2012)