Browsing by author "Wickramanayaka, S."

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Introducing novel metal gate materials for decananometer CMOS in the agile fab: a case study

Deweerd, Wim; Schram, Tom; Catana, Gabriela; Shamiryan, Denis; Garaud, Sylvain; Hellin, David; De Gendt, Stefan; Heyns, Marc; Wickramanayaka, S.; Kawashima, T.; Yamada, N.; Vertommen, Johan; Lander, Rob (2004)
PVD-HfSiON gate dielectrics with Ni-FUSI electrode for 65nm LSTP application

Yamamoto, Kazuhiko; Kubicek, Stefan; Rothschild, Aude; Mitsuhashi, Riichirou; Deweerd, Wim; Veloso, Anabela; Jurczak, Gosia; Biesemans, Serge; De Gendt, Stefan; Wickramanayaka, S.; Hayashi, S.; Niwa, Masaaki (2005-06)