Browsing by author "Tonova, Diana"

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Interpretation of spectroscopic ellipsometry measurements of ultrathin dielectric layers on silicon: impact of accuracy of the silicon optical constants

Tonova, Diana; Depas, Michel; Vanhellemont, Jan (1996)
Single Wavelength and Spectroscopic Ellipsometry Characterization of Ultra-Thin Gate Oxides on Silicon and Comparison with Electrical Results

Tonova, Diana; Depas, Michel; Libezny, Milan; Heyns, Marc; Vanhellemont, Jan (1995)