Publication:
Interpretation of spectroscopic ellipsometry measurements of ultrathin dielectric layers on silicon: impact of accuracy of the silicon optical constants
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1943 since deposited on 2021-09-29
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Acq. date: 2026-10-07
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Statistics
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1943 since deposited on 2021-09-29
2last month
2last week
Acq. date: 2026-10-07
Citations