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Interpretation of spectroscopic ellipsometry measurements of ultrathin dielectric layers on silicon: impact of accuracy of the silicon optical constants
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1937 since deposited on 2021-09-29
1last month
Acq. date: 2025-12-08
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Metrics
Views
1937 since deposited on 2021-09-29
1last month
Acq. date: 2025-12-08
Citations