Publication:
Single Wavelength and Spectroscopic Ellipsometry Characterization of Ultra-Thin Gate Oxides on Silicon and Comparison with Electrical Results
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1984 since deposited on 2021-09-29
2last month
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Acq. date: 2026-02-28
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Statistics
Views
1984 since deposited on 2021-09-29
2last month
1last week
Acq. date: 2026-02-28
Citations