Browsing by author "Royere, Gael"

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Dummy gate amorphous silicon CMP using in-situ profile CLC endpoint system for advanced FinFET

Tsvetanova, Diana; Iizumi, Takeshi; Ito, Ban; Royere, Gael; Durix, Fabien; Devriendt, Katia; Ong, Patrick; Struyf, Herbert (2017)
The impact of the pad surface temperature control on W CMP performance

Royere, Gael; Teugels, Lieve; Ito, Ban; Iizumi, Takeshi; Durix, Fabien; Devriendt, Katia; Ong, Patrick; Struyf, Herbert (2018-10)