Authors

Tsvetanova, Diana; Iizumi, Takeshi; Ito, Ban; Royere, Gael; Durix, Fabien; Devriendt, Katia; Ong, Patrick; Struyf, Herbert

Conference

International Conference on. Planarization/CMP Technology - ICPT

Title

Dummy gate amorphous silicon CMP using in-situ profile CLC endpoint system for advanced FinFET

Publication type

Proceedings paper