Publication:
Dummy gate amorphous silicon CMP using in-situ profile CLC endpoint system for advanced FinFET
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2116 since deposited on 2021-10-24
3last month
Acq. date: 2026-10-09
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Views
2116 since deposited on 2021-10-24
3last month
Acq. date: 2026-10-09
Citations