Publication:
Dummy gate amorphous silicon CMP using in-situ profile CLC endpoint system for advanced FinFET
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2101 since deposited on 2021-10-24
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Acq. date: 2026-04-06
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2101 since deposited on 2021-10-24
2last month
2last week
Acq. date: 2026-04-06
Citations