Publication:
Dummy gate amorphous silicon CMP using in-situ profile CLC endpoint system for advanced FinFET
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2113 since deposited on 2021-10-24
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Acq. date: 2026-08-06
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Views
2113 since deposited on 2021-10-24
8last month
4last week
Acq. date: 2026-08-06
Citations