The impact of the pad surface temperature control on W CMP performance

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Authors
Royere, Gael; Teugels, Lieve; Ito, Ban; Iizumi, Takeshi; Durix, Fabien; Devriendt, Katia; Ong, Patrick; Struyf, Herbert
Conference
International Conference on Planarization CMP Technology - ICPT
Title
The impact of the pad surface temperature control on W CMP performance
Publication type
Proceedings paper
Embargo date
9999-12-31
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