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The impact of the pad surface temperature control on W CMP performance
Publication:
The impact of the pad surface temperature control on W CMP performance
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Date
2018-10
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Royere, Gael
;
Teugels, Lieve
;
Ito, Ban
;
Iizumi, Takeshi
;
Durix, Fabien
;
Devriendt, Katia
;
Ong, Patrick
;
Struyf, Herbert
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1807
since deposited on 2021-10-26
Acq. date: 2025-12-16
Citations
Metrics
Views
1807
since deposited on 2021-10-26
Acq. date: 2025-12-16
Citations