Browsing by author "Beckhoff, B."
Now showing items 1-6 of 6
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Characterisation of high-k containing nanolayers by reference-free X-ray fluorescence analysis with synchrotron radiation
Kolbe, M.; Beckhoff, B.; Krumrey, M.; Reading, M.; Van den berg, J.; Conard, Thierry; De Gendt, Stefan (2009) -
Depth-profiling of vertical sidewall nanolayers on structured wafers by grazing incidence X-ray fluorescence
Honicke, P.; Beckhoff, B.; Kolbe, M.; List, Scott; Conard, Thierry; Struyf, Herbert (2008) -
High depth resolution depth profile analysis of ultra thin high-k Hf based films using MEIS compared with XTEM, XRF, SE and XPS
van den Berg, J.A.; Reading, M.A.; Parisini, A.; Kolbe, M.; Beckhoff, B.; Ladas, S.; Petrik, P.; Bailey, P.; Noakes, T.; Conard, Thierry; De Gendt, Stefan (2009) -
High depth resolution depth profile analysis of ultra thin high-k Hf based films using MEIS compared with XTEM, XRF, SE and XPS
van den Berg, J.A.; Reading, M. A.; Parisini, A.; Kolbe, M.; Beckhoff, B.; Ladas, S.; Fried, M.; Petrik, P.; Bailey, P.; Noakes, T.; Conard, Thierry; De Gendt, Stefan (2009) -
Investigations of the surface chemical composition and atomic structure of ex-situ sulfur passivated Ge(100)
Fleischmann, Claudia; Sioncke, Sonja; Schouteden, K.; Paredis, K.; Beckhoff, B.; Müller, M.; Kolbe, M.; Meuris, Marc; Van Haesendonck, C.; Temst, K.; Vantomme, Andre (2009) -
Nanolayer characterisation by reference-free X-ray fluorescence analysis with synchrotron radiation
Kolbe, M.; Beckhoff, B.; Krumrey, M.; Reading, M.A.; van den Berg, J.A.; Conard, Thierry; De Gendt, Stefan (2009)