Browsing by author "Bellandi, E."
Now showing items 1-4 of 4
-
Characterization of high-k dielectrics by combined spectroscopic ellipsometry (SE) and x-ray reflectometry (XRR)
Sun, L.; Defranoux, C.; Stehlé, J.L.; Boher, P.; Evrard, P.; Bellandi, E.; Bender, Hugo (2004) -
Comparison of RCA and IMEC clean (HF last) type cleaning sequences in full production environment
Wolke, K.; Schenkl, M.; Silvestre, P.; Bellandi, E.; Alessandri, M.; Cornelissen, Ingrid; Meuris, Marc (1996) -
High-k dielectric characterization by combined VUV spectroscopic ellipsometry and X-ray reflectometry
Boher, P.; Evrard, P.; Defranoux, C.; Darragon, A.; Sun, Lianchao; Fouere, J.C.; Stehlé, J.L.; Bellandi, E.; Bender, Hugo (2003-12) -
High-k dielectric characterization by VUV spectroscopic ellipsometry and X-ray reflection
Boher, P.; Evrard, P.; Defranoux, C.; Fouere, J.C.; Bellandi, E.; Bender, Hugo (2003)