Browsing by author "Willson, C. Grant"
Now showing items 1-5 of 5
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A progress report on DSA of high-chi silicon containing block co-polymers
Willson, C. Grant; Janes, Dustin; Ito, Natsuko; Blachut, Gregory; Sirard, Stephen; Someya, Yasunobu; Doise, Jan; Mizuochi, Ryuta; Lane, Austin; Vandenberghe, Geert; Rincon Delgadillo, Paulina; Yang, XiaoMin; Ellison, Christopher (2018) -
Defect mitigation in sub-20 nm patterning with high-chi, silicon containing block copolymers
Doise, Jan; Mannaert, Geert; Suh, Hyo Seon; Rincon Delgadillo, Paulina; Vandenberghe, Geert; Willson, C. Grant; Ellison, Christopher J. (2018) -
EUV resist requirements: absorbance and acid yield
Gronheid, Roel; Fonseca, Carlos; Leeson, Michael; Adams, Jacob; Strahan, Jeff; Willson, C. Grant; Smith, Bruce W. (2009) -
Fluorinated polymethacrylates as highly sensitive nonchemically amplified e-beam resists
Strahan, Jeffrey R.; Adams, Jacob R.; Jen, Wei-Lun; Vanleenhove, Anja; Neikirk, Colin C.; Rochelle, Timothy; Gronheid, Roel; Willson, C. Grant (2009) -
Strategies for increasing the rate of defect annihilation in the directed self-assembly of high- $v block copolymers
Doise, Jan; Koh, Jai Hyun; Kim, Ji Yeon; Zhu, Qingjun; Kinoshita, Natsuko; Suh, Hyo Seon; Rincon Delgadillo, Paulina; Vandenberghe, Geert; Willson, C. Grant; Ellison, Christopher J. (2019)