Publication:

A progress report on DSA of high-chi silicon containing block co-polymers

Date

2018

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

Willson, C. Grant

;

;

;

Blachut, Gregory

;

Sirard, Stephen

;

Someya, Yasunobu

;

;

Mizuochi, Ryuta

;

;

Vandenberghe, Geert

;

Rincon Delgadillo, Paulina

;

;

Ellison, Christopher

Metrics

1948 since deposited on 2021-10-26

Acq. date: 2025-12-10