Publication:

Defect mitigation in sub-20 nm patterning with high-chi, silicon containing block copolymers

Date

2018

Proceedings Paper

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Author(s)

;

Mannaert, Geert

;

;

Rincon Delgadillo, Paulina

;

Vandenberghe, Geert

;

Willson, C. Grant

;

Ellison, Christopher J.

Statistics

1991 since deposited on 2021-10-25

Acq. date: 2026-02-27