Authors

Doise, Jan; Mannaert, Geert; Suh, Hyo Seon; Rincon Delgadillo, Paulina; Vandenberghe, Geert; Willson, C. Grant; Ellison, Christopher J.

Conference

4th International Symposium on DSA

Title

Defect mitigation in sub-20 nm patterning with high-chi, silicon containing block copolymers

Publication type

Proceedings paper