Browsing by author "Shirotori, Akihide"
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Development of main chain scission type photoresists for EUV lithography
Shirotori, Akihide; Vesters, Yannick; Hoshino, Manabu; Rathore, Ashish; De Simone, Danilo; Vandenberghe, Geert; Matsumoto, Hirokazu (2019) -
Development on main chain scission resists for high-NA EUV lithography
Shirotori, Akihide; Hoshino, Manabu; Fujimura, Makoto; Yeh, Sin Fu; Suh, Hyo Seon; De Simone, Danilo; Vandenberghe, Geert; Sanuki, Hideaki (2023) -
Improved resolution with main chain scission resists for EUV lithography
Shirotori, Akihide; Hoshino, Manabu; Rathore, Ashish; Fu, Yeh Sin; De Simone, Danilo; Vandenberghe, Geert; Matsumoto, Hirokazu (2022)