Browsing by author "Kwinten, Hans"

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Lithographic importance of acid diffusion in chemically amplified resists

Van Steenwinckel, David; Lammers, Jeroen; Leunissen, Peter; Kwinten, Hans (2005)
Overbake: sub-40-nm gate patterning with ArF lithography and binary masks

Van Steenwinckel, David; Kwinten, Hans; Locorotondo, Sabrina; Beckx, Stephan (2004)